Granted Patent
Utility
US 6,042,989 · App. 09/178,827
Radiation sensitive compositions of terpolymers containing organosilicon side chains
Inventors:
Ulrich Schaedeli, Eric Tinguely, Manfred Hofmann, Pasquale Alfred Falcigno, Carl-Lorenz Mertesdorf
Patented Case
View Patent ↗
Granted: Mar 28, 2000
Filed: Oct 26, 1998
Inventors
Ulrich Schaedeli
Eric Tinguely
Manfred Hofmann
Pasquale Alfred Falcigno
Carl-Lorenz Mertesdorf
Assignee (at issue)
Olin Microelectronic Chemicals, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.