IP Library Granted Patent US 6,043,468
Granted Patent Utility
US 6,043,468 · App. 09/126,847

Carbon heater

Inventors: Eiichi Toya, Masahiko Ichishima, Tomio Konn, Tomohiro Nagata, Shigeru Yamamura, Norihiko Saito, Kouji Teraoka, Takeshi Inaba, Hiroyuki Honma, Ken Nakao, Takanori Saito, Hisaei Osanai, Toshiyuki Makiya
Patented Case View Patent ↗
Granted: Mar 28, 2000 Filed: Jul 31, 1998
Inventors
Eiichi Toya
Masahiko Ichishima
Tomio Konn
Tomohiro Nagata
Shigeru Yamamura
Norihiko Saito
Kouji Teraoka
Takeshi Inaba
Hiroyuki Honma
Ken Nakao
Takanori Saito
Hisaei Osanai
Toshiyuki Makiya
Assignees (at issue)
Toshiba Ceramics Co., Ltd.
Tokyo Electron Limited

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Quick Facts
Patent No.
US 6,043,468
App. No.
09/126,847
Filed
1998-07-31
Granted
2000-03-28
Kind
A