Granted Patent
Utility
US 6,044,534 · App. 08/761,833
Semiconductor device manufacturing machine and method for manufacturing a semiconductor device by using the same manufacturing machine
Inventors:
Hirofumi Seo, Shinichi Hiramatsu
Patented Case
View Patent ↗
Granted: Apr 4, 2000
Filed: Dec 9, 1996
Inventors
Hirofumi Seo
Shinichi Hiramatsu
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.