Granted Patent
Utility
US 6,044,701 · App. 08/815,323
Thermal mass flow controller having orthogonal thermal mass flow sensor
Inventors:
Michael Doyle, Dan B. LeMay, Kim Ngoc Vu
Patented Case
View Patent ↗
Granted: Apr 4, 2000
Filed: Mar 10, 1997
Inventors
Michael Doyle
Dan B. LeMay
Kim Ngoc Vu
Assignee (at issue)
Unit Instruments
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.