Granted Patent
Utility
US 6,045,665 · App. 09/085,133
Method of manufacturing member for thin-film formation apparatus and the member for the apparatus
Inventors:
Tateo Ohhashi, Atsushi Fukushima, Hideyuki Takahashi
Patented Case
View Patent ↗
Granted: Apr 4, 2000
Filed: May 26, 1998
Inventors
Tateo Ohhashi
Atsushi Fukushima
Hideyuki Takahashi
Assignee (at issue)
Japan Energy Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.