Granted Patent
Utility
US 6,045,978 · App. 09/211,700
Chemically treated photoresist for withstanding ion bombarded processing
Inventors:
Dean Tran, William L. Jones, Harvey N. Rogers, Jr.
Patented Case
View Patent ↗
Granted: Apr 4, 2000
Filed: Dec 14, 1998
Inventors
Dean Tran
William L. Jones
Harvey N. Rogers, Jr.
Assignee (at issue)
TRW Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.