Granted Patent
Utility
US 6,046,435 · App. 09/274,067
Method of heating a substrate with multiple selectively deactuated heaters
Inventors:
Scott C. Holden, Mehran Asdigha, Lawrence R. Moschini, Darius Dilmaghani, Mario Valenza
Patented Case
View Patent ↗
Granted: Apr 4, 2000
Filed: Mar 22, 1999
Inventors
Scott C. Holden
Mehran Asdigha
Lawrence R. Moschini
Darius Dilmaghani
Mario Valenza
Assignee (at issue)
Brooks Automation GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.