Granted Patent
Utility
US 6,046,487 · App. 08/989,303
Shallow trench isolation with oxide-nitride/oxynitride liner
Inventors:
John Benedict, David M. Dobuzinsky, Philip L. Flaitz, Erwin Hammerl, Herbert L. Ho, James F. Moseman, Herbert Palm, Seiko Yoshida, Hiroshi Takato
Patented Case
View Patent ↗
Granted: Apr 4, 2000
Filed: Dec 12, 1997
Inventors
John Benedict
David M. Dobuzinsky
Philip L. Flaitz
Erwin Hammerl
Herbert L. Ho
James F. Moseman
Herbert Palm
Seiko Yoshida
Hiroshi Takato
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.