Granted Patent
Utility
US 6,048,664 · App. 09/266,912
Energy-sensitive resist material and a process for device fabrication using an energy-sensitive resist material
Inventors:
Francis Houlihan, Il'ya Rushkin
Patented Case
View Patent ↗
Granted: Apr 11, 2000
Filed: Mar 12, 1999
Inventors
Francis Houlihan
Il'ya Rushkin
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.