Granted Patent
Utility
US 6,049,115 · App. 08/842,845
Scanning probe microscope, and semiconductor distortion sensor for use therein
Inventors:
Hiroshi Takahashi, Nobuhiro Shimizu, Yoshiharu Shirakawabe
Patented Case
View Patent ↗
Granted: Apr 11, 2000
Filed: Apr 17, 1997
Inventors
Hiroshi Takahashi
Nobuhiro Shimizu
Yoshiharu Shirakawabe
Assignee (at issue)
SEIKO INSTRUMENTS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.