Granted Patent
Utility
US 6,054,015 · App. 09/018,921
Apparatus for loading and unloading substrates to a chemical-mechanical planarization machine
Inventors:
Thad Brunelli, Gina Garrison, Wade Van Buren
Patented Case
View Patent ↗
Granted: Apr 25, 2000
Filed: Feb 5, 1998
Inventors
Thad Brunelli
Gina Garrison
Wade Van Buren
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.