Granted Patent
Utility
US 6,054,365 · App. 09/114,546
Process for filling deep trenches with polysilicon and oxide
Inventor:
Steven C. Lizotte
Patented Case
View Patent ↗
Granted: Apr 25, 2000
Filed: Jul 13, 1998
Inventor
Steven C. Lizotte
Assignee (at issue)
International Rectifier Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.