Granted Patent
Utility
US 6,057,921 · App. 09/106,917
Two piece mirror arrangement for interferometrically controlled stage
Inventor:
Shi-Kay Yao
Patented Case
View Patent ↗
Granted: May 2, 2000
Filed: Jun 29, 1998
Inventor
Shi-Kay Yao
Assignee (at issue)
ETEC SYSTEMS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.