Granted Patent
Utility
US 6,058,739 · App. 09/183,220
Long life fused silica ultraviolet optical elements
Inventors:
Richard G. Morton, Richard L. Sandstrom, William N. Partlo
Patented Case
View Patent ↗
Granted: May 9, 2000
Filed: Oct 29, 1998
Inventors
Richard G. Morton
Richard L. Sandstrom
William N. Partlo
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.