Granted Patent
Utility
US 6,059,643 · App. 08/803,623
Apparatus and method for polishing a flat surface using a belted polishing pad
Inventors:
Albert Hu, Burford J. Furman, Mohamed Abushaban
Patented Case
View Patent ↗
Granted: May 9, 2000
Filed: Feb 21, 1997
Inventors
Albert Hu
Burford J. Furman
Mohamed Abushaban
Assignee (at issue)
Aplex, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.