Granted Patent
Utility
US 6,060,697 · App. 09/039,141
Substrate processing apparatus having regulated power consumption and method therefor
Inventors:
Akihiko Morita, Masami Ohtani, Yasuo Imanishi, Masao Tsuji, Masaki Iwami, Joichi Nishimura, Kazuhiro Nishimura, Tetsuya Hamada, Satoshi Yamamoto, Kenji Kamei
Patented Case
View Patent ↗
Granted: May 9, 2000
Filed: Mar 13, 1998
Inventors
Akihiko Morita
Masami Ohtani
Yasuo Imanishi
Masao Tsuji
Masaki Iwami
Joichi Nishimura
Kazuhiro Nishimura
Tetsuya Hamada
Satoshi Yamamoto
Kenji Kamei
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.