Granted Patent
Utility
US 6,061,129 · App. 09/236,148
Compact high resolution grating spectrometer
Inventors:
Alexander I. Ershov, Gamaralalage G. Padmabandu, Palash P. Das
Patented Case
View Patent ↗
Granted: May 9, 2000
Filed: Jan 22, 1999
Inventors
Alexander I. Ershov
Gamaralalage G. Padmabandu
Palash P. Das
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.