Granted Patent
Utility
US 6,061,376 · App. 09/143,633
Tangential fan for excimer laser
Inventors:
Thomas Hofmann, James K. Howey, Robert A. Shannon, Richard C. Ujazdowski
Patented Case
View Patent ↗
Granted: May 9, 2000
Filed: Aug 28, 1998
Inventors
Thomas Hofmann
James K. Howey
Robert A. Shannon
Richard C. Ujazdowski
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.