Granted Patent
Utility
US 6,062,852 · App. 09/060,422
Substrate heat-treating apparatus
Inventors:
Takanori Kawamoto, Masami Ohtani, Yasuo Imanishi, Masao Tsuji, Masaki Iwami, Joichi Nishimura, Akihiko Morita
Patented Case
View Patent ↗
Granted: May 16, 2000
Filed: Apr 14, 1998
Inventors
Takanori Kawamoto
Masami Ohtani
Yasuo Imanishi
Masao Tsuji
Masaki Iwami
Joichi Nishimura
Akihiko Morita
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.