Granted Patent
Utility
US 6,062,952 · App. 08/869,256
Planarization process with abrasive polishing slurry that is selective to a planarized surface
Inventors:
Karl M. Robinson, Guy F. Hudson, Scott Meikle
Patented Case
View Patent ↗
Granted: May 16, 2000
Filed: Jun 5, 1997
Inventors
Karl M. Robinson
Guy F. Hudson
Scott Meikle
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.