Granted Patent
Utility
US 6,062,968 · App. 09/062,327
Polishing pad for a semiconductor substrate
Inventors:
Roland Sevilla, Frank B. Kaufman, Sriram Anjur
Patented Case
View Patent ↗
Granted: May 16, 2000
Filed: Apr 17, 1998
Inventors
Roland Sevilla
Frank B. Kaufman
Sriram Anjur
Assignee (at issue)
Cabot Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.