Granted Patent
Utility
US 6,063,530 · App. 08/999,926
Control of critical dimensions through measurement of absorbed radiation
Inventor:
Andreas Grassmann
Patented Case
View Patent ↗
Granted: May 16, 2000
Filed: Jun 23, 1997
Inventor
Andreas Grassmann
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.