Granted Patent
Utility
US 6,063,705 · App. 09/141,236
Precursor chemistries for chemical vapor deposition of ruthenium and ruthenium oxide
Inventor:
Brian A. Vaartstra
Patented Case
View Patent ↗
Granted: May 16, 2000
Filed: Aug 27, 1998
Inventor
Brian A. Vaartstra
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.