Granted Patent
Utility
US 6,064,072 · App. 09/268,243
Plasma focus high energy photon source
Inventors:
William N. Partlo, Igor V. Fomenkov, Daniel L. Birx
Patented Case
View Patent ↗
Granted: May 16, 2000
Filed: Mar 15, 1999
Inventors
William N. Partlo
Igor V. Fomenkov
Daniel L. Birx
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.