Granted Patent
Utility
US 6,064,216 · App. 09/241,553
Apparatus for testing semiconductor wafers
Inventors:
Warren M. Farnworth, Salman Akram, Alan G. Wood, David R. Hembree, James M. Wark, John O. Jacobson
Patented Case
View Patent ↗
Granted: May 16, 2000
Filed: Feb 1, 1999
Inventors
Warren M. Farnworth
Salman Akram
Alan G. Wood
David R. Hembree
James M. Wark
John O. Jacobson
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.