Granted Patent
Utility
US 6,064,518 · App. 09/051,374
Beam deflecting unit for multiple-axis examination in a microscope
Inventors:
Ernst H. K. Stelzer, Steffen Lindek
Patented Case
View Patent ↗
Granted: May 16, 2000
Filed: Jul 28, 1998
Inventors
Ernst H. K. Stelzer
Steffen Lindek
Assignee (at issue)
Carl Zeiss Jena GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.