Granted Patent
Utility
US 6,064,800 · App. 09/250,950
Apparatus for uniform gas and radiant heat dispersion for solid state fabrication processes
Inventor:
Gurtej S. Sandhu
Patented Case
View Patent ↗
Granted: May 16, 2000
Filed: Feb 16, 1999
Inventor
Gurtej S. Sandhu
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.