Granted Patent
Utility
US 6,065,489 · App. 09/090,920
Ozone flow rate control device
Inventor:
Atsuji Matsuwaka
Patented Case
View Patent ↗
Granted: May 23, 2000
Filed: Jun 5, 1998
Inventor
Atsuji Matsuwaka
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.