IP Library Granted Patent US 6,065,615
Granted Patent Utility
US 6,065,615 · App. 08/805,227

Vertical wafer boat

Inventors: Taroh Uchiyama, Takashi Tsukamoto, Jiro Nishihama
Patented Case View Patent ↗
Granted: May 23, 2000 Filed: Feb 24, 1997
Inventors
Taroh Uchiyama
Takashi Tsukamoto
Jiro Nishihama
Assignee (at issue)
ASAHI GLASS CO., LTD.

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Quick Facts
Patent No.
US 6,065,615
App. No.
08/805,227
Filed
1997-02-24
Granted
2000-05-23
Kind
A