Granted Patent
Utility
US 6,066,535 · App. 09/368,799
Method of manufacturing semiconductor device
Inventor:
Ichiro Murai
Patented Case
View Patent ↗
Granted: May 23, 2000
Filed: Aug 5, 1999
Inventor
Ichiro Murai
Assignee (at issue)
Nippon Steel Semiconductor Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.