Granted Patent
Utility
US 6,066,544 · App. 09/111,922
Isolation regions and methods of forming isolation regions
Inventors:
Pai-Hung Pan, Karl M. Robinson
Patented Case
View Patent ↗
Granted: May 23, 2000
Filed: Jul 8, 1998
Inventors
Pai-Hung Pan
Karl M. Robinson
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.