Granted Patent
Utility
US 6,067,306 · App. 09/081,374
Laser-illuminated stepper or scanner with energy sensor feedback
Inventors:
Richard L. Sandstrom, Palash P. Das, Igor V. Fomenkov, Herve A. Besaucele, Robert G. Ozarski
Patented Case
View Patent ↗
Granted: May 23, 2000
Filed: May 19, 1998
Inventors
Richard L. Sandstrom
Palash P. Das
Igor V. Fomenkov
Herve A. Besaucele
Robert G. Ozarski
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.