Granted Patent
Utility
US 6,068,137 · App. 09/297,258
Semiconductor wafer carrier
Inventor:
Chikayuki Takashima
Patented Case
View Patent ↗
Granted: May 30, 2000
Filed: Jun 11, 1999
Inventor
Chikayuki Takashima
Assignee (at issue)
SUMITOMO METAL INDUSTRIES, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.