Granted Patent
Utility
US 6,068,441 · App. 08/976,537
Substrate transfer system for semiconductor processing equipment
Inventors:
Ivo Raaijmakers, Loren Jacobs, Mike Halpin, Jim Alexander, Ken O'Neill, Dennis L. Goodwin
Patented Case
View Patent ↗
Granted: May 30, 2000
Filed: Nov 21, 1997
Inventors
Ivo Raaijmakers
Loren Jacobs
Mike Halpin
Jim Alexander
Ken O'Neill
Dennis L. Goodwin
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.