Granted Patent
Utility
US 6,068,549 · App. 09/363,980
Structure and method for three chamber CMP polishing head
Inventor:
Paul David Jackson
Patented Case
View Patent ↗
Granted: May 30, 2000
Filed: Jul 28, 1999
Inventor
Paul David Jackson
Assignee (at issue)
MITSUBISHI MATERIALS CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.