Granted Patent
Utility
US 6,068,787 · App. 08/891,468
Composition and slurry useful for metal CMP
Inventors:
Steven Grumbine, Christopher C. Streinz, Brian L. Mueller
Patented Case
View Patent ↗
Granted: May 30, 2000
Filed: Jul 11, 1997
Inventors
Steven Grumbine
Christopher C. Streinz
Brian L. Mueller
Assignee (at issue)
Cabot Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.