IP Library Granted Patent US 6,069,045
Granted Patent Utility
US 6,069,045 · App. 09/213,437

Method of forming C49-structure tungsten-containing titanium salicide structure

Inventors: Kunihiro Fujii, Ken Inoue, Kuniko Miyakawa, Kaoru Mikagi
Patented Case View Patent ↗
Granted: May 30, 2000 Filed: Dec 17, 1998
Inventors
Kunihiro Fujii
Ken Inoue
Kuniko Miyakawa
Kaoru Mikagi
Assignee (at issue)
NEC CORPORATION

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Quick Facts
Patent No.
US 6,069,045
App. No.
09/213,437
Filed
1998-12-17
Granted
2000-05-30
Kind
A