Granted Patent
Utility
US 6,069,094 · App. 08/924,304
Method for depositing a thin film
Inventors:
Hideki Matsumura, Akira Izumi, Atsushi Masuda, Yasunobu Nashimoto, Yosuke Miyoshi, Shuji Nomura, Kazuo Sakurai, Shouichi Aoshima
Patented Case
View Patent ↗
Granted: May 30, 2000
Filed: Sep 5, 1997
Inventors
Hideki Matsumura
Akira Izumi
Atsushi Masuda
Yasunobu Nashimoto
Yosuke Miyoshi
Shuji Nomura
Kazuo Sakurai
Shouichi Aoshima
Assignees (at issue)
Hideki Matsumra
NEC CORPORATION
Anelva Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.