Granted Patent
Utility
US 6,070,735 · App. 09/201,143
Sputtering apparatus simulation method
Inventor:
Toshiyuki Ohta
Patented Case
View Patent ↗
Granted: Jun 6, 2000
Filed: Nov 30, 1998
Inventor
Toshiyuki Ohta
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.