Granted Patent
Utility
US 6,071,562 · App. 09/074,298
Process for depositing titanium nitride films
Inventors:
Verne Hornback, Derryl D. J. Allman
Patented Case
View Patent ↗
Granted: Jun 6, 2000
Filed: May 7, 1998
Inventors
Verne Hornback
Derryl D. J. Allman
Assignee (at issue)
LSI Logic Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.