Granted Patent
Utility
US 6,071,816 · App. 08/921,131
Method of chemical mechanical planarization using a water rinse to prevent particle contamination
Inventors:
David Watts, Rajeev Bajaj, Sanjit Das
Patented Case
View Patent ↗
Granted: Jun 6, 2000
Filed: Aug 29, 1997
Inventors
David Watts
Rajeev Bajaj
Sanjit Das
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.