Granted Patent
Utility
US 6,071,818 · App. 09/109,331
Endpoint detection method and apparatus which utilize an endpoint polishing layer of catalyst material
Inventors:
Brynne K. Chisholm, Gayle W. Miller, Gail D. Shelton
Patented Case
View Patent ↗
Granted: Jun 6, 2000
Filed: Jun 30, 1998
Inventors
Brynne K. Chisholm
Gayle W. Miller
Gail D. Shelton
Assignee (at issue)
LSI Logic Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.