Granted Patent
Utility
US 6,071,821 · App. 09/128,668
Dry etching method of thin film
Inventors:
Noriyuki Hirata, Mitsuru Shibata
Patented Case
View Patent ↗
Granted: Jun 6, 2000
Filed: Aug 4, 1998
Inventors
Noriyuki Hirata
Mitsuru Shibata
Assignee (at issue)
Kabushiki Kaisha Toshiba
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.