Granted Patent
Utility
US 6,072,191 · App. 08/991,299
Interlevel dielectric thickness monitor for complex semiconductor chips
Inventors:
Tho Le La, John Jianshi Wang, Hao Fang
Patented Case
View Patent ↗
Granted: Jun 6, 2000
Filed: Dec 16, 1997
Inventors
Tho Le La
John Jianshi Wang
Hao Fang
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.