Granted Patent
Utility
US 6,073,366 · App. 09/110,544
Substrate cooling system and method
Inventor:
Thomas Aswad
Patented Case
View Patent ↗
Granted: Jun 13, 2000
Filed: Jul 6, 1998
Inventor
Thomas Aswad
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.