IP Library Granted Patent US 6,073,484
Granted Patent Utility
US 6,073,484 · App. 08/683,929

Microfabricated torsional cantilevers for sensitive force detection

Inventors: Scott Miller, Noel C. MacDonald, Yang Xu
Patented Case View Patent ↗
Granted: Jun 13, 2000 Filed: Jul 19, 1996
Inventors
Scott Miller
Noel C. MacDonald
Yang Xu
Assignee (at issue)
Cornell Research Foundation, Inc.

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Quick Facts
Patent No.
US 6,073,484
App. No.
08/683,929
Filed
1996-07-19
Granted
2000-06-13
Kind
A