Granted Patent
Utility
US 6,074,486 · App. 09/062,715
Apparatus and method for manufacturing a semiconductor device having hemispherical grains
Inventors:
Chang-jip Yang, Chan Hee HAN, Young-kyou Park, Jae Wook Kim
Patented Case
View Patent ↗
Granted: Jun 13, 2000
Filed: Apr 20, 1998
Inventors
Chang-jip Yang
Chan Hee HAN
Young-kyou Park
Jae Wook Kim
Assignee (at issue)
SAMSUNG DISPLAY CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.