Granted Patent
Utility
US 6,074,515 · App. 09/044,812
Apparatus for processing substrates
Inventors:
Izuru Iseki, Seiichiro Sato, Yusuke Muraoka
Patented Case
View Patent ↗
Granted: Jun 13, 2000
Filed: Mar 20, 1998
Inventors
Izuru Iseki
Seiichiro Sato
Yusuke Muraoka
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.