Granted Patent
Utility
US 6,074,538 · App. 08/872,467
Thin film forming equipment
Inventors:
Tadahiro Ohmi, Tadashi Shibata, Masaru Umeda
Patented Case
View Patent ↗
Granted: Jun 13, 2000
Filed: Jun 10, 1997
Inventors
Tadahiro Ohmi
Tadashi Shibata
Masaru Umeda
Assignee (at issue)
Tadahiro Ohmi
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.