Granted Patent
Utility
US 6,074,546 · App. 08/915,775
Method for photoelectrochemical polishing of silicon wafers
Inventors:
Lizhong Sun, James Shen, Lee Melbourne Cook
Patented Case
View Patent ↗
Granted: Jun 13, 2000
Filed: Aug 21, 1997
Inventors
Lizhong Sun
James Shen
Lee Melbourne Cook
Assignee (at issue)
Rodel Holdings, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.